Contamination insensitive differential capacitive pressure sensors

被引：0
|
作者：
Wang, C.C. [1 ]
Gogoi, B.P. [1 ]
Monk, D.J. [1 ]
Mastrangelo, C.H. [1 ]
机构：
[1] Univ of Michigan, Ann Arbor, United States
来源：
Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) | 2000年
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D O I：
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摘要：
10
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页码：551 / 555
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