Diameter-controlled Czochralski growth of silicon crystals

被引:0
|
作者
Zhang, H. [1 ,2 ]
Zheng, L.L. [3 ]
Prasad, V. [1 ,2 ]
Larson Jr., D.J. [3 ]
机构
[1] Department of Mechanical Engineering, State University of New York, Stony Brook, NY 11794-2300, United States
[2] ASME
[3] Dept. of Mat. Sci. and Engineering, State University of New York, Stony Brook, NY 11794-2275, United States
来源
Journal of Heat Transfer | 1998年 / 120卷 / 04期
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页码:874 / 882
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