Bias effect on compositional separation in sputtered Co-Cr films

被引：0
|
作者：
Takei, Koji [1 ]
Rogers, David J. [1 ]
Maeda, Yasushi [1 ]
机构：
[1] NTT Interdisciplinary Research Lab, Ibaraki, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1994年 / 33卷 / 10期
关键词：
17;
D O I：
暂无
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学科分类号：
摘要：
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页码：5739 / 5742
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