Scanning probe microscope lithography of silicon using a combination of a carbon nanotube tip and a polysilane film as a mask

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[1] Okazaki, Ai
[2] Akita, Seiji
[3] Nakayama, Yoshikazu
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Okazaki, A. (nakayama@pe.osakafu-u.ac.jp) | 1600年 / Japan Society of Applied Physics卷 / 41期
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