Multi-scale analysis for CVD processes (2nd report, extension of intermolecular potential model)

被引：0

作者：

Sakiyama, Yukinori ^{[1
]}

Takagi, Shu ^{[1
]}

Matsumoto, Yoichiro ^{[1
]}

机构：

[1] Department of Mechanical Engineering, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan

来源：

Nippon Kikai Gakkai Ronbunshu, B Hen/Transactions of the Japan Society of Mechanical Engineers, Part B | 2003年 / 69卷 / 681期

关键词：

D O I：

10.1299/kikaib.69.1021

中图分类号：

学科分类号：

摘要：

引用

页码：1021 / 1027

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