Multi-scale analysis for CVD processes (2nd report, extension of intermolecular potential model)

被引：0
|
作者：
Sakiyama, Yukinori [1 ]
Takagi, Shu [1 ]
Matsumoto, Yoichiro [1 ]
机构：
[1] Department of Mechanical Engineering, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan
来源：
Nippon Kikai Gakkai Ronbunshu, B Hen/Transactions of the Japan Society of Mechanical Engineers, Part B | 2003年 / 69卷 / 681期
关键词：
D O I：
10.1299/kikaib.69.1021
中图分类号：
学科分类号：
摘要：
7
引用
收藏
页码：1021 / 1027
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