Effects of oxygen addition on diamond film growth by electron-cyclotron-resonance microwave plasma CVD apparatus

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[1] Nunotani, Masayuki
[2] Komori, Masaaki
[3] Yamasawa, Masahiro
[4] Fujiwara, Yasufumi
[5] Sakuta, Ken
[6] Kobayashi, Takeshi
[7] Nakashima, Shinichi
[8] Minomo, Shoichiro
[9] Taniguchi, Michio
[10] Sugiyo, Masato
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Nunotani, Masayuki | 1600年 / 30期
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