Effects of oxygen addition on diamond film growth by electron-cyclotron-resonance microwave plasma CVD apparatus

被引：0
|
作者：
机构：
[1] Nunotani, Masayuki
[2] Komori, Masaaki
[3] Yamasawa, Masahiro
[4] Fujiwara, Yasufumi
[5] Sakuta, Ken
[6] Kobayashi, Takeshi
[7] Nakashima, Shinichi
[8] Minomo, Shoichiro
[9] Taniguchi, Michio
[10] Sugiyo, Masato
来源：
Nunotani, Masayuki | 1600年 / 30期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] EFFECTS OF OXYGEN ADDITION ON DIAMOND FILM GROWTH BY ELECTRON-CYCLOTRON-RESONANCE MICROWAVE PLASMA CVD APPARATUS
    NUNOTANI, M
    KOMORI, M
    YAMASAWA, M
    FUJIWARA, Y
    SAKUTA, K
    KOBAYASHI, T
    NAKASHIMA, S
    MINOMO, S
    TANIGUCHI, M
    SUGIYO, M
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1991, 30 (7A): : L1199 - L1202
  • [2] An experimental apparatus with microwave electron-cyclotron-resonance plasma
    Poluektov, NP
    Tsargorodtsev, YP
    INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 1996, 39 (04) : 611 - 615
  • [3] An Experimental Apparatus with Microwave Electron-Cyclotron-Resonance Plasma
    Poluektov, N. P.
    Tsar'gorodtsev, Y. P.
    Instruments and Experimental Techniques (English Translation of Pribory I Tekhnika Eksperimenta), 1996, 39
  • [4] ELECTRONIC CHARACTERIZATION OF DIAMOND FILMS PREPARED BY ELECTRON-CYCLOTRON-RESONANCE MICROWAVE PLASMA
    JIN, S
    FANCIULLI, M
    MOUSTAKAS, TD
    ROBINS, LH
    DIAMOND AND RELATED MATERIALS, 1994, 3 (4-6) : 878 - 882
  • [5] OPTIMIZATION OF DIAMOND GROWTH WITH STATISTICAL EXPERIMENT DESIGN IN AN ELECTRON-CYCLOTRON-RESONANCE PLASMA
    RING, Z
    MANTEI, TD
    CHOO, AG
    JACKSON, HE
    APPLIED PHYSICS LETTERS, 1994, 65 (01) : 121 - 123
  • [6] CHARACTERISTICS OF A MICROWAVE ELECTRON-CYCLOTRON-RESONANCE PLASMA SOURCE
    CAMPS, E
    OLEA, O
    GUTIERREZTAPIA, C
    VILLAGRAN, M
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1995, 66 (05): : 3219 - 3227
  • [7] Electron-cyclotron-resonance plasma heating with broadband microwave radiation: Anomalous effects
    Kawai, Y.
    Alton, G. D.
    Tarvainen, O.
    Suominen, P.
    Koivisto, H.
    PHYSICS LETTERS A, 2007, 371 (04) : 307 - 313
  • [8] ELECTRICAL-CONDUCTIVITY STUDIES OF DIAMOND FILMS PREPARED BY ELECTRON-CYCLOTRON-RESONANCE MICROWAVE PLASMA
    JIN, S
    MOUSTAKAS, TD
    APPLIED PHYSICS LETTERS, 1993, 63 (17) : 2354 - 2356
  • [9] RESONANCE ZONE EFFECTS ON ELECTRON HEATING OF AN ELECTRON-CYCLOTRON-RESONANCE PLASMA
    BERNHARDI, K
    FUCHS, G
    GOLDMAN, MA
    HERBERT, HC
    OBERMANN, D
    WALCHER, W
    PHYSICS LETTERS A, 1974, A 50 (05) : 324 - 326
  • [10] ELECTRON-CYCLOTRON-RESONANCE PLASMA SOURCE FOR CONDUCTIVE FILM DEPOSITION
    ONO, T
    NISHIMURA, H
    SHIMADA, M
    MATSUO, S
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1994, 12 (04): : 1281 - 1286
12345