Cryogenic temperature sensors

The technology of a carbon film resistance thermometer operating in the temperature range 4.2-20 K, the R (T) characteristics, and the magnetoresistance in high magnetic fields, up to 7 T are reported. Electron beam evaporation was used as the evaporation technique. R-X diffraction and transmission electron microscopy observations have shown an amorphous character for the deposited films. The sensitivity of these thermometers is comparable to or higher than the sensitivity of similar thermometers found on the international market. The magnetoresistance at 4.2 K and 7 T is very low, thus ensuring an error of 0.7-2 percent in the temperature instruments.