Features of Particle Excitation in High-Frequency Capacitive Discharge

被引：0
|
作者：
Orlov, L. N.
Nekrashevich, Y. I.
机构：
来源：
Journal of Applied Spectroscopy | / 64卷 / 03期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] Features of particle excitation in high-frequency capacitive discharge
    Oriov, L.N.
    Nekrashevich, Ya. I.
    Journal of Applied Spectroscopy, 1997, 64 (03): : 304 - 309
  • [2] Features of particle excitation in high-frequency capacitive discharge
    L. N. Oriov
    Ya. I. Nekrashevich
    Journal of Applied Spectroscopy, 1997, 64 (3) : 304 - 309
  • [3] On the Impedance of the High-Frequency Capacitive Discharge at Different Excitation Methods
    Dvinin, S. A.
    Sinkevich, O. A.
    Kodirzoda, Z. A.
    Solikhov, D. K.
    PLASMA PHYSICS REPORTS, 2022, 48 (01) : 74 - 77
  • [4] On the Impedance of the High-Frequency Capacitive Discharge at Different Excitation Methods
    S. A. Dvinin
    O. A. Sinkevich
    Z. A. Kodirzoda
    D. K. Solikhov
    Plasma Physics Reports, 2022, 48 : 74 - 77
  • [5] On the impedance of a high-frequency capacitive discharge with different excitation methods
    Dvinin S.A.
    Sinkevich O.A.
    Kodirzoda Z.A.
    Solikhov D.K.
    Applied Physics, 2021, (03): : 33 - 38
  • [6] Effect of the size of nanoparticles on the properties of a capacitive high-frequency discharge
    Shveigert, I. V.
    Peeters, F. M.
    JETP LETTERS, 2007, 86 (09) : 572 - 576
  • [7] PROSPECTS FOR USE OF THE HIGH-FREQUENCY CAPACITIVE DISCHARGE IN THE LASER TECHNIQUE
    MYSHENKOV, VI
    YATSENKO, NA
    KVANTOVAYA ELEKTRONIKA, 1981, 8 (10): : 2121 - 2129
  • [8] OBSERVATION OF ELECTRON-BEAMS IN THE CAPACITIVE HIGH-FREQUENCY DISCHARGE
    KAZANTSEV, SA
    SUBBOTENKO, AV
    PISMA V ZHURNAL TEKHNICHESKOI FIZIKI, 1984, 10 (20): : 1251 - 1254
  • [9] Effect of the size of nanoparticles on the properties of a capacitive high-frequency discharge
    I. V. Shveigert
    F. M. Peeters
    JETP Letters, 2008, 86 : 572 - 576
  • [10] ON ELECTRON KINETICS IN CAPACITIVE HIGH-FREQUENCY DISCHARGE AT LOW-PRESSURE
    KAZANTSEV, SA
    SMIRNOVA, OM
    SUBBOTENKO, AV
    VESTNIK LENINGRADSKOGO UNIVERSITETA SERIYA FIZIKA KHIMIYA, 1988, (03): : 9 - 16
12345