Transition of particle growth region in SiH4 RF discharges

被引：0
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作者：
Kawasaki, Hiroharu [1 ]
Sakamoto, Kazutaka [1 ]
Maeda, Shinichi [1 ]
Fukuzawa, Tsuyoshi [1 ]
Shiratani, Masaharu [1 ]
Watanabe, Yukio [1 ]
机构：
[1] Kyushu Univ, Fukuoka, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1998年 / 37卷 / 10期
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页码：5757 / 5762
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