Transition of particle growth region in SiH4 RF discharges

被引：0

作者：

Kawasaki, Hiroharu ^{[1
]}

Sakamoto, Kazutaka ^{[1
]}

Maeda, Shinichi ^{[1
]}

Fukuzawa, Tsuyoshi ^{[1
]}

Shiratani, Masaharu ^{[1
]}

Watanabe, Yukio ^{[1
]}

机构：

[1] Kyushu Univ, Fukuoka, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1998年 / 37卷 / 10期

关键词：

D O I：

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摘要：

引用

页码：5757 / 5762

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[1] Transition of particle growth region in SiH4 RF discharges
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