Substrate-independent wafer transfer technique for surface-micromachined devices

被引：0

作者：

Nguyen, H. ^{[1
]}

Patterson, P. ^{[1
]}

Toshiyoshi, H. ^{[1
]}

Wu, M.C. ^{[1
]}

机构：

[1] Univ of California at Los Angeles, Los Angeles, United States

来源：

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) | 2000年

关键词：

Wafer transfer techniques;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

We report on a new wafer transfer technique that can remove and transfer surface-micromachined layers to application-specific substrates. This process, however, is not limited to only MEMS devices and can be applicable to other semiconductor devices. Successful transfer of a 1 cm×1 cm MEMS chip with electrostatically actuated curled cantilever switches to a transparent quartz substrate has been demonstrated. Pull-in voltage for transferred devices is 31 V compared with 23 V for devices on standard silicon substrates.

引用

页码：628 / 632

共 47 条

[31] Substrate-Independent and Re-Writable Surface Patterning by Combining Polydopamine Coatings, Silanization, and Thiol-Ene Reaction
Li, Shuai
Scheiger, Johannes M.
Wang, Zhenwu
Dong, Zheqin
Welle, Alexander
Trouillet, Vanessa
Levkin, Pavel A.
ADVANCED FUNCTIONAL MATERIALS, 2021, 31 (50)
[32] Supramolecular Surface Chemistry: Substrate-Independent, Phosphate-Driven Growth of Polyamine-Based Multifunctional Thin Films
Marmisolle, Waldemar A.
Irigoyen, Joseba
Gregurec, Danijela
Moya, Sergio
Azzaroni, Omar
ADVANCED FUNCTIONAL MATERIALS, 2015, 25 (26) : 4144 - 4152
[33] Surface Initiated Polymerization on Pulsed Plasma Deposited Polyallylamine: A Polymer Substrate-Independent Strategy to Soft Surfaces with Polymer Brushes
Yameen, Basit
Khan, Hadayat Ullah
Knoll, Wolfgang
Foerch, Renate
Jonas, Ulrich
MACROMOLECULAR RAPID COMMUNICATIONS, 2011, 32 (21) : 1735 - 1740
[34] A single-mask substrate transfer technique for the fabrication of high-aspect-ratio micromachined structures
Tang, M.
Liu, A. Q.
Agarwal, A.
Habib, M. H.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2007, 17 (08) : 1575 - 1582
[35] Wafer-level integration technique of surface mount devices on a Si-wafer with vibration energy and gravity force
Sudou, Minoru
Takao, Hidekuni
Sawada, Kazuaki
Ishida, Makoto
IEEE TRANSACTIONS ON COMPONENTS AND PACKAGING TECHNOLOGIES, 2007, 30 (03): : 457 - 463
[36] Silanization of Plasma-Activated Hexamethyldisiloxane-Based Plasma Polymers for Substrate-Independent Deposition of Coatings with Controlled Surface Chemistry
Egghe, Tim
Ghobeira, Rouba
Tabaei, Parinaz Saadat Esbah
Morent, Rino
Hoogenboom, Richard
De Geyter, Nathalie
ACS APPLIED MATERIALS & INTERFACES, 2022, 14 (03) : 4620 - 4636
[37] Substrate-Independent Control of Polymorphs in Tetraphenylporphyrin Thin Films by Varying the Solvent Evaporation Time Using a Simple Spin-Coating Technique
Tomita, Kazutaka
Shioya, Nobutaka
Shimoaka, Takafumi
Okudaira, Koji K.
Yoshida, Hiroyuki
Koganezawa, Tomoyuki
Hasegawa, Takeshi
CRYSTAL GROWTH & DESIGN, 2021, 21 (09) : 5116 - 5125
[38] Substrate-Independent Micropatterning of Polymer Brushes Based on Photolytic Deactivation of Chemical Vapor Deposition Based Surface-Initiated Atom-Transfer Radical Polymerization Initiator Films
Kumar, Ramya
Welle, Alexander
Becker, Fabian
Kopyeva, Irma
Lahann, Joerg
ACS APPLIED MATERIALS & INTERFACES, 2018, 10 (38) : 31965 - 31976
[39] Design of conformal, substrate-independent surface modification for controlled protein adsorption by chemical vapor deposition (CVD) (vol 8, pg 31, 2012)
Yang, Rong
Asatekin, Ayse
Gleason, Karen K.
SOFT MATTER, 2012, 8 (48) : 12135 - 12135
[40] IMPROVING BIOCOMPATIBILY OF LASER MICROMACHINED SILICON WAFER BY SURFACE COATING WITH POLY(ETHYLENE GLYCOL) DIACRYLATE AND DIAMOND-LIKE CARBON FOR BIOMEDICAL DEVICES
Wongwiwat, Plawut
Narayan, Roger J.
Lee, Yuan-Shin
PROCEEDINGS OF THE ASME INTERNATIONAL MANUFACTURING SCIENCE AND ENGINEERING CONFERENCE 2010, VOL 2, 2011, : 273 - 280

← 1 2 3 4 5 →