Characterisation of multilayers by X-ray reflection

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作者：
Delft Univ of Technology, Delft, Netherlands [1 ]
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Surf Sci | / 2卷 / 229-240期
关键词：
Atomic force microscopy - Calculations - Electromagnetic wave scattering - Interfaces (materials) - Morphology - Multilayers - Reflection - Single crystals - Surface roughness - Surface structure - X ray diffraction analysis - X rays;
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摘要：
The inclusion of refraction effects in kinematic scattering theory provides a powerful tool for describing diffuse scattering by X-ray reflectivity. The theory is applied to multilayers with roughened interfaces. Islands and miscut-induced steps as well as randomly oriented roughness are included in the theory. The interfacial roughness leads to a broad, diffuse intensity distribution around the multilayer Bragg reflections. From the line shape, the morphology of the interfaces can be deduced. The calculated profiles are compared with experimental data from a 4×(Si/GexSi1-x) multilayer with vicinal interfaces. Clear side peaks are observed from which the mean island size and the average step height are deduced, which are consistent with AFM images.
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