Interfacial reactions in the thin film Y2O3 on chemically oxidized Si(100) substrate systems

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Department of Ceramic Engineering, Yonsei Univ., 134 Shinchon-Dong S., Seoul, Korea, Republic of [1 ]
不详 [2 ]
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Thin Solid Films | / 1卷 / 8-11期
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This research is funded by Korean Science and Education Foundation; which we gratefully appreciate. We also thank Prof. R. Sinclair for letting us access to the transmission electron microscopy at Stanford University;
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