Radiation thermometry of silicon wafers in a diffusion furnace for fabrication of LSI

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[1] Watanabe, Tomoji
[2] Torii, Takuji
[3] Hirasawa, Shigeki
[4] Takagaki, Tetsuya
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Watanabe, Tomoji | 1600年 / 04期
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Integrated Circuit Manufacture;
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