OPTIMUM CONDITION OF MULTIPOLE FIELD FOR AN ECR-TYPE ION SOURCE.

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作者：
Ishii, Shigeyuki [1 ]
Yanokura, Minoru [1 ]
Amemiya, Hiroshi [1 ]
机构：
[1] Inst of Physical & Chemical, Research, Wako, Jpn, Inst of Physical & Chemical Research, Wako, Jpn
来源：
Japanese Journal of Applied Physics, Part 2: Letters | 1986年 / 25卷 / 09期
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页码：712 / 715
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