Synthesis of cubic boron nitride thin films by low-energy ion beam assisted deposition by applying substrate bias

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作者：
Park, Young-Joon [1 ]
Baik, Young-Joon [1 ]
机构：
[1] Thin Film Technology Research Center, Korea Inst. of Sci. and Technology, 39-1 Hawolkok-dong, Seongbuk-ku, Seoul 130-650, Korea, Republic of
来源：
Metals and Materials International | 1999年 / 5卷 / 04期
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页码：381 / 387
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