Heat treatment of cathodic arc deposited amorphous hard carbon films

被引：0
|
作者：
Anders, Simone [1 ]
Ager III, Joel W. [1 ]
Pharr, George M. [1 ]
Tsui, Ting Y. [1 ]
Brown, I.G. [1 ]
机构：
[1] Lawrence Berkeley Natl Lab, Berkeley, United States
来源：
Thin Solid Films | 1997年 / 308-309卷
关键词：
Number:; DE-AC03–76SF00098; Acronym:; -; Sponsor:; DE-AC05–760R00033; DE-AC05–96OR222464; USDOE; Sponsor: U.S. Department of Energy; ARO118–95; ARO; Sponsor: Army Research Office; BES; Sponsor: Basic Energy Sciences; ORAU; Sponsor: Oak Ridge Associated Universities; 8042–03; EPRI; Sponsor: Electric Power Research Institute;
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页码：186 / 190
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