Amorphous carbon fibrilliform nanomaterials prepared by chemical vapor deposition

被引：0

作者：

Takikawa, Hirofumi ^{[3
]}

Yatsuki, Miki ^{[3
]}

Miyano, Ryuichi ^{[3
]}

Nagayama, Makoto ^{[3
]}

Sakakibara, Tateki ^{[3
]}

Itoh, Shigeo ^{[1
]}

Ando, Yoshinori ^{[2
]}

机构：

[1] Product Development Center, Futaba Corporation, Chousei, Chiba 299-4395, Japan

[2] Department of Physics, Meijo University, Nagoya 468-8502, Japan

[3] Dept. of Elec. and Electron. Eng., Toyohashi Univerity of Technology, Toyohashi, Aichi 441-8580, Japan

来源：

| 1600年 / JJAP, Tokyo卷 / 39期

关键词：

Carbon - Catalysts - Chemical vapor deposition - Crystal orientation - Ethylene - Silicon - Substrates - Synthesis (chemical);

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Carbon nanomaterials were prepared by chemical vapor deposition (CVD) and hot-filament CVD (HF-CVD) methods. The substrates were silicon 〈100〉 and copper plates on which catalytic metal or metal-oxide thin films were coated by means of the cathodic arc deposition technique. Ethylene gas was used as a precursor. HF-CVD with a filament temperature of 1,000 °C yielded a larger amount of carbon deposit at a lower furnace temperature of 600 °C. High-resolution microscopic observation revealed a variety of amorphous carbon nanomaterials, such as frost columns, coral beads, microcoils, nanocoils, and amorphous nanotubes.

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