共 50 条
- [1] Hillock formation during electromigration in Cu and Al thin films: three-dimensional grain growth Applied Physics Letters, 1995, 66 (10):
- [4] Relationship between the void and hillock formation and the grain growth in thin aluminum films MATERIALS RELIABILITY IN MICROELECTRONICS VI, 1996, 428 : 493 - 498
- [8] Initial hillock formation and changes in overall stress in Al–Cu films and pure Al films during heating Journal of Materials Research, 1999, 14 : 4087 - 4092
- [9] Nanocharacterization of texture and hillock formation in thin Al and Al-0.2%Cu films for thin-film transistors THIN FILMS - STRUCTURE AND MORPHOLOGY, 1997, 441 : 415 - 420