Laser tunning silicon microdevices for analog microelectronics

被引：0
|
作者：
École Polytechnique de Montréal, Département de Génie Physique, Case Postale 6079, succ. Centre-Ville, Montréal [1 ]
QC
H3C 3A7, Canada
不详 [2 ]
QC
H3C 3A7, Canada
不详 [3 ]
QC
H7V 4B4, Canada
机构：
来源：
Proc SPIE Int Soc Opt Eng | 1600年 / 205-207期
关键词：
Compendex;
D O I：
SPIE Regional Meeting on Optoelectronics, Photonics, and Imaging, Opto-Canada 2002
中图分类号：
学科分类号：
摘要：
Silicon - Iterative methods - Laser beams - Semiconductor junctions
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