Diagnostics and modelling of hollow cathode arc plasma used for deposition of metal-carbon films

被引：0
|
作者：
Buuron, A. [1 ]
Bolt, H. [1 ]
Nizot, P. [1 ]
Koch, F. [1 ]
机构：
[1] Forschungszentrum Juelich GmbH, Juelich, Germany
来源：
Surface Engineering | 1998年 / 14卷 / 05期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：405 / 412
相关论文
共 50 条
  • [21] Plasma wall interaction for TiNx film deposition in a hollow cathode arc discharge
    Eggs, C
    Kersten, H
    Wagner, HE
    Wulff, H
    THIN SOLID FILMS, 1996, 290 : 381 - 385
  • [22] Pulsed laser deposition and characterization of multilayer metal-carbon thin films
    Siraj, K.
    Khaleeq-ur-Rahman, M.
    Rafique, M. S.
    Munawar, M. Z.
    Naseem, S.
    Riaz, S.
    APPLIED SURFACE SCIENCE, 2011, 257 (15) : 6445 - 6450
  • [23] ANALYSIS OF GRADED METAL-CARBON FILMS PRODUCED BY DUAL-CATHODE SPUTTERING
    WILSON, HR
    MCKENZIE, DR
    BRIGGS, LM
    THIN SOLID FILMS, 1982, 91 (02) : 123 - 130
  • [24] Deposition of metal thin films using a hollow cathode hydrogen discharge
    Muhl, Stephen
    Cruz, Julio
    Camps, Ivan
    Garzon-Fontecha, Angelica
    SURFACE & COATINGS TECHNOLOGY, 2022, 442
  • [25] Quick synthesis of carbon nitride films by new DC hollow cathode plasma sputtering deposition technique
    Yang, P
    Feng, XP
    Shi, YC
    Yan, YH
    Zhang, J
    INTERNATIONAL JOURNAL OF MODERN PHYSICS B, 2005, 19 (30): : 4437 - 4447
  • [26] Properties of the carbon polymer films produced with the help of arc discharge on hollow cathode
    Eruzin, A.A.
    Afanas'ev, V.N.
    Gavrilenko, I.B.
    Udalov, Yu.P.
    Fizika i Khimiya Obrabotki Materialov, 2003, (04): : 28 - 30
  • [27] DIAGNOSTICS AND MODELING OF A METHANE PLASMA USED IN THE CHEMICAL VAPOR-DEPOSITION OF AMORPHOUS-CARBON FILMS
    TACHIBANA, K
    NISHIDA, M
    HARIMA, H
    URANO, Y
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1984, 17 (08) : 1727 - 1742
  • [28] OSCILLATIONS IN A HOLLOW-CATHODE ARC PLASMA
    GUNSHOR, RL
    NOON, JH
    HOLT, EH
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1968, 13 (02): : 278 - &
  • [29] Diagnostics of the start-up process of an arc hollow cathode
    Belt, David
    Mankowski, John
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2008, 36 (04) : 1210 - 1211
  • [30] Optical and Langmuir Probe Diagnostics in a Magnetised Hollow Cathode Arc
    Avaria, Gonzalo
    Lunk, Achim
    Schroeder, Attila
    Vinogradov, Igor Pavlovitch
    PLASMA PROCESSES AND POLYMERS, 2009, 6 : S352 - S356
12345