Diagnostics and modelling of hollow cathode arc plasma used for deposition of metal-carbon films

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作者：
Buuron, A. [1 ]
Bolt, H. [1 ]
Nizot, P. [1 ]
Koch, F. [1 ]
机构：
[1] Forschungszentrum Juelich GmbH, Juelich, Germany
来源：
Surface Engineering | 1998年 / 14卷 / 05期
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页码：405 / 412
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