Ion beam assisted deposition of tungsten on GaAs

被引：0
|
作者：
Xu, Zheng [1 ]
Kosugi, Toshihiko [1 ]
Gamo, Kenji [1 ]
Namba, Susumu [1 ]
机构：
[1] Osaka Univ, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1990年 / 29卷 / 01期
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页码：23 / 26
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