Kinetics of reaction at interface of Si3N4/W joint

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作者
Shimoo, Toshio [1 ]
Sandjaja, Ari [1 ]
Adachi, Shin-ichiro [1 ]
Okamura, Kiyohito [1 ]
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[1] Univ of Osaka Prefecture, Sakai-shi, Japan
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Silicon nitride;
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页码:108 / 112
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