Temperature dependence of ion-beam mixing in Fe/Zr bilayers

被引：0
|
作者：
Ding, Fu-Rong [1 ]
Okamoto, P.R. [1 ]
Rehn, L.E. [1 ]
机构：
[1] Argonne Natl Lab, United States
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1989年 / B39卷 / 1-4期
关键词：
Diffusion - Ion Beams - Applications;
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学科分类号：
摘要：
Ion-beam mixing results obtained as a function of temperature during 1 MeV Kr irradiation of Fe/Zr bilayer films prepared by vapor deposition onto oxidized Si substrates are reported. RBS measurements of W marker shifts showed that Fe atoms diffuse faster than Zr atoms do during irradiation. X-ray diffraction using a Read camera indicated the formation of an amorphous phase during mixing. Activation enthalpies of 1.4 eV for mass transport at temperatures above 480 K, and 0.07 eV at temperatures between 330-470 K, were extracted from the measurements.
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页码：122 / 125
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