In situ optical monitoring of two-dimensional crystal growth in layer-by-layer chemical vapor deposition of YBa2Cu3Ox

被引：0

作者：

Sakai, Kenji ^{[1
]}

Zama, Hideaki ^{[1
]}

Oda, Shunri ^{[1
]}

机构：

[1] Tokyo Inst of Technol, Tokyo, Japan

来源：

Japanese Journal of Applied Physics, Part 2: Letters | 1993年 / 32卷 / 5 A期

关键词：

Ceramic materials - Chemical vapor deposition - High temperature superconductors - Yttrium compounds;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

We have applied an in situ optical growth monitoring method to layer-by-layer chemical vapor deposition of YBaCuO thin films and observed a staircaselike change in reflectance. Once step corresponds to one cycle of source gas supply combination and growth of one unit cell of the YBa2Cu3Ox structure. This step is completed when Cu is supplied for the third time and the final layer consisting of a unit cell is applied. This result suggests that two-dimensional crystal growth of YBa2Cu3Ox occurs. The calculation of reflectance change is consistent with the hypothesis that the reflectance change is due to layer-by-layer growth of YBaCuO.

引用

共 50 条

[31] Chemical vapor deposition for few-layer two-dimensional materials
Zhang, Qing
Geng, Dechao
Hu, Wenping
SMARTMAT, 2023, 4 (03):
[32] RAPID SYNTHESIS OF THE YBA2CU3OX FILM ON METAL-SUBSTRATE BY CHEMICAL VAPOR-DEPOSITION TECHNIQUE
YAMAGUCHI, T
AOKI, S
SADAKATA, N
KOHNO, O
SAJI, A
KURODA, N
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (07): : 1398 - 1399
[33] Spectroscopic study on plasma-enhanced chemical vapor deposition of YBa2Cu3Ox superconducting thin films
Sugii, Nobuyuki
Imagawa, Kazushige
Saito, Sakae
Kanehori, Keiichi
1600, (30):
[34] EPITAXIAL YBA2CU3OX THIN-FILMS ON SAPPHIRE WITH A PRBA2CU3OX BUFFER LAYER
GAO, J
KLOPMAN, BBG
AARNINK, WAM
REITSMA, AE
GERRITSMA, GJ
ROGALLA, H
JOURNAL OF APPLIED PHYSICS, 1992, 71 (05) : 2333 - 2337
[35] Homoepitaxial Growth of YBa2Cu3O7 on Single Crystal YBa2Cu3Ox Substrates
Morishita, T.
Zama, H.
Shiohara, Y.
Acta Physica Polonica A, 92 (01):
[36] THERMODYNAMIC SIMULATION OF YBA2CU3OX DEPOSITION FROM THE VAPOR GAS-PHASE
ILYINYH, NI
MOISEEV, GK
VATOLIN, NA
SESTAK, J
THERMOCHIMICA ACTA, 1992, 198 (02) : 357 - 367
[37] Superconducting properties of ultrathin films of YBa2Cu3Ox prepared by metalorganic chemical vapor deposition at 500°C
Zama, Hideaki
Saga, Jun
Hattori, Takeo
Oda, Shunri
Japanese Journal of Applied Physics, Part 2: Letters, 1994, 33 (3 A):
[38] Low-temperature growth of YBa2Cu3Ox by pulsed laser deposition
Takahashi, M
Takai, Y
SUPERCONDUCTOR SCIENCE & TECHNOLOGY, 1998, 11 (03): : 265 - 269
[39] Improvement of YBa2Cu3Ox single-crystal surface by chemical etching
Tanaka, N
Zama, H
Morishita, T
Yamamoto, H
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1999, 38 (7A): : L731 - L733
[40] INSITU MONITORING OF OPTICAL REFLECTANCE OSCILLATION IN LAYER-BY-LAYER CHEMICAL VAPOR-DEPOSITION OF OXIDE SUPERCONDUCTOR FILMS
ZAMA, H
SAKAI, K
ODA, S
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1992, 31 (9A): : L1243 - L1245

← 1 2 3 4 5 →