Touch probe sensor using longitudinal vibration of PZT thin film transducer

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作者：
Kanda, Takefumi [1 ]
Morita, Takeshi [1 ]
Kurosawa, Minoru K. [1 ]
Higuchi, Toshiro [1 ]
机构：
[1] Univ of Tokyo, Tokyo, Japan
来源：
Proceedings of the IEEE Ultrasonics Symposium | 1998年 / 1卷
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页码：481 / 484
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