Ferroelectric properties of SrBi2Ta2O9 thin films deposited on various bottom electrodes by a modified radio-frequency magnetron sputtering technique

被引:0
|
作者
Yang, Cheol-Hoon [1 ]
Shin, Woong-Chul [1 ]
Choi, Eun-Suck [1 ]
Hwang, Jun-Sik [1 ]
Yoon, Soon-Gil [1 ]
Choi, Won-Youl [1 ]
Kim, Ho-Gi [1 ]
机构
[1] Chungnam Natl Univ, Taejon, Korea, Republic of
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
页码:5549 / 5553
相关论文
共 50 条
  • [11] Electrical properties of SrBi2Ta2O9 thin films deposited by rf magnetron sputtering
    Yang, CH
    Park, SS
    Yoon, SG
    INTEGRATED FERROELECTRICS, 1997, 18 (1-4) : 377 - 387
  • [12] Nd-substituted SrBi2Ta2O9 ferroelectric thin films prepared by radio frequency magnetron sputtering
    Lia, Yibin
    Zhang, Sam
    Fei, Weidong
    Sritharan, Thirumany
    Xu, Cong
    THIN SOLID FILMS, 2007, 515 (23) : 8371 - 8375
  • [13] Low temperature preparation of ferroelectric SrBi2Ta2O9 thin films by a modified RF magnetron sputtering technique
    Yang, CH
    Kim, JS
    Yoon, SG
    INTEGRATED FERROELECTRICS, 1998, 21 (1-4) : 475 - 483
  • [14] Integrated capacitor array effect on the ferroelectric properties for SrBi2Ta2O9 thin films fabricated by the radio frequency magnetron sputtering deposition technique
    Lee, JK
    Kim, TS
    Jung, HJ
    Cho, KJ
    Park, JW
    Kim, HJ
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 1998, 32 : S1550 - S1552
  • [15] Preparation of SrBi2Ta2O9 ferroelectric thin films by RF magnetron sputtering
    Nishioka, Y
    Ishiwara, H
    INTEGRATED FERROELECTRICS, 2002, 46 : 265 - 274
  • [16] Surface and interface analysis of SrBi2Ta2O9 thin films fabricated by the radio frequency magnetron sputtering
    Lee, JK
    Cho, KJ
    Lee, SH
    Park, YB
    Park, JW
    Yoon, KH
    Kim, TS
    Jung, HJ
    ECASIA 97: 7TH EUROPEAN CONFERENCE ON APPLICATIONS OF SURFACE AND INTERFACE ANALYSIS, 1997, : 495 - 498
  • [17] Influence of annealing temperature on ferroelectric properties of SrBi2Ta2O9 thin films prepared by off-axis radio frequency magnetron sputtering
    Tay, ST
    Jiang, XH
    Huan, CHA
    Wee, ATS
    Liu, R
    JOURNAL OF APPLIED PHYSICS, 2000, 88 (10) : 5928 - 5934
  • [18] Characteristics of SrBi2Ta2O9 thin films fabricated by the RF magnetron sputtering technique
    Lee, JK
    Song, TK
    Jung, HJ
    INTEGRATED FERROELECTRICS, 1997, 15 (1-4) : 115 - 125
  • [19] Preparation of SrBi2Ta2O9 ferroelectric thin film by RF magnetron sputtering
    Suu, K
    Masuda, T
    Nishioka, Y
    Tani, N
    INTEGRATED FERROELECTRICS, 1998, 21 (1-4) : 407 - 418
  • [20] The post annealing effects on ferroelectric properties of SrBi2Ta2O9 thin films prepared by RF magnetron sputtering
    Park, SS
    INTEGRATED FERROELECTRICS, 2001, 33 (1-4) : 199 - 208