Interfacial reaction in the sputter-deposited SiO2/Ti0.1W0.9 antifuse system

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Baek, Jong Tae
Park, Hyung-Ho
Cho, Kyung-Ik
Yoo, Hyung Joun
Kang, Sang Won
Ahn, Byung Tae
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Journal of Applied Physics | 1995年 / 78卷 / 12期
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