共 50 条
- [21] Waveguide formation by He+ and H+ ion implantation in filter glass containing nanoparticles NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 124 (01): : 76 - 80
- [25] The role of implantation damage in the production of silicon-on-insulator films by co-implantation of He+ and H+ SILICON MATERIALS SCIENCE AND TECHNOLOGY, VOLS 1 AND 2, 1998, : 1385 - 1394
- [26] Charge carrier lifetime modification in silicon by high energy H+ or He+ ion implantation NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1997, 127 : 388 - 392
- [27] Charge carrier lifetime modification in silicon by high energy H+, He+ ion implantation MATERIALS SCIENCE APPLICATIONS OF ION BEAM TECHNIQUES, 1997, 248-2 : 101 - 106
- [29] Nanovoid layer induced by He+ and H+ implantation and its gettering effect in SOI wafers 1998 5TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY PROCEEDINGS, 1998, : 757 - 760
- [30] Efficient production of silicon-on-insulator films by co-implantation of He+ with H+ 1997 IEEE INTERNATIONAL SOI CONFERENCE PROCEEDINGS, 1996, : 44 - 45