Microstereophotolithography and shape memory alloy for the fabrication of miniaturized actuators

被引：0
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作者：
Ballandras, S. [1 ]
Calin, M. [1 ]
Zissi, S. [1 ]
Bertsch, A. [1 ]
Andre, J.C. [1 ]
Hauden, D. [1 ]
机构：
[1] Lab de Physique et Metrologie des, Oscillateurs du CNRS, Besancon, France
来源：
Sensors and Actuators, A: Physical | 1997年 / 62卷 / 1 -3 pt 3期
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页码：741 / 747
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