DIELECTRIC PROPERTIES OF MgO FILMS PREPARED BY DIFFERENT METHODS.

被引：0
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作者：
Lyabin, A.A.
Sharikov, G.A.
Kornitskiy, Ye.U.
Volkov, V.V.
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来源：
Radio engineering & electronic physics | 1979年 / 24卷 / 10期
关键词：
FILMS - Dielectric Properties;
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摘要：
An investigation is presented of the characteristics of MgO films prepared by three different methods in vacuum deposition systems. 1. Oxidation of the metallic magnesium as it is slowly evaporated in oxygen. 2. Oxidation of the metallic magnesium as it is evaporated in ionized oxygen, produced in a special discharge apparatus. 3. Evaporation of the MgO by an electron beam in vacuum from a pellet that had beem made by the mechanical molding of ChDA-grade MgO powder. The results obtained showed that the dielectric properties of MgO films depend on the techniques employed in preparing them.
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页码：138 / 141
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