Electrical, optical, and structural properties of indium-tin-oxide thin films deposited on polyethylene terephthalate substrates by rf sputtering

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Department of Electrical Engineering, Michigan Technological University, Houghton, MI 49931, United States ^{[1
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J. Vac. Sci. Technol. A Vac. Surf. Films | / 3卷 / 1636-1640期

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[1] Electrical, optical, and structural properties of indium-tin-oxide thin films deposited on polyethylene terephthalate substrates by rf sputtering
Kulkarni, A.K.
Lim, T.
Khan, M.
Schulz, Kirk H.
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1998, 16 (3 pt 2):
[2] Electrical, optical, and structural properties of indium-tin-oxide thin films deposited on polyethylene terephthalate substrates by rf sputtering
Kulkarni, AK
Lim, T
Khan, M
Schulz, KH
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1998, 16 (03): : 1636 - 1640
[3] Indium-tin-oxide thin films deposited on polyethylene-terephthalate substrates by substrate-biased RF magnetron sputtering
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[4] Electrical, optical and structural characteristics of indium-tin-oxide thin films deposited on glass and polymer substrates
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[5] The effect of annealing on the structural, electrical, optical and electrochromic properties of indium-tin-oxide films deposited by RF magnetron sputtering technique
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[6] RF REACTIVE SPUTTERING OF INDIUM-TIN-OXIDE FILMS
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[7] ELECTRICAL AND OPTICAL-PROPERTIES OF INDIUM TIN OXIDE THIN-FILMS DEPOSITED ON UNHEATED SUBSTRATES BY DC REACTIVE SPUTTERING
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[8] Effect of deflection on the mechanical and optoelectronic properties of indium tin oxide films deposited on polyethylene terephthalate substrates by pulse magnetron sputtering
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[9] Structural, electrical and optical properties of indium-tin-oxide thin films prepared by pulsed laser deposition
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[10] Electrical properties of aluminum oxide films deposited on indium-tin-oxide glasses
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