Finite element method simulation of double-ended tuning-fork quartz resonator for application to vibratory gyro-sensor

被引:0
|
作者
Sato, Kenji [1 ,2 ]
Ono, Atsushi [1 ]
Tomikawa, Yoshiro [3 ]
机构
[1] Fundamental R and D Division, Engineering Operations Headquarters, TOYOCOM Devices, 2-1-1 Koyato, Samukawa, Koza, Kanagawa 253-0192, Japan
[2] GPHSFSE, Grad. Sch. of Sci. and Eng., Yamagata University, 4-3-16 Jonan, Yonezawa, Yamagata 992-8510, Japan
[3] Department of Electrical Engineering, Faculty of Engineering, Yamagata University, 4-3-16 Jonan, Yonezawa, Yamagata 992-8510, Japan
来源
| 1600年 / Japan Society of Applied Physics卷 / 42期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
10
引用
收藏
相关论文
共 50 条
  • [41] Development of highly sensitive force sensor with accurate gap control using double-ended tuning fork
    Fukuzawa, Kenji
    Ando, Takamasa
    Shibamoto, Masami
    Zhang, Hedong
    Mitsuya, Yasunaga
    Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C, 2006, 72 (01): : 125 - 131
  • [42] A FINITE ELEMENT ANALYSIS OF ELECTRICAL PARAMETERS OF A QUARTZ CRYSTAL TUNING FORK RESONATOR WITH ANSYS
    Xu, Xiangwu
    Wang, Zhen
    Wang, Ji
    2013 SYMPOSIUM ON PIEZOELECTRICITY, ACOUSTIC WAVES AND DEVICE APPLICATIONS (SPAWDA), 2013, : 351 - 354
  • [43] VHF band-pass filter based on a single CMOS-MEMS double-ended tuning fork resonator
    Lopez, J. L.
    Verd, J.
    Uranga, A.
    Murillo, G.
    Giner, J.
    Marigo, E.
    Torres, F.
    Abadal, G.
    Barniol, N.
    PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE, 2009, 1 (01): : 1131 - +
  • [44] DOUBLE-ENDED TUNING FORK RESONANT STRAIN SENSOR OPERATED IN ATMOSPHERIC ENVIRONMENT USING A GALVANIC PROTECTION TECHNIQUE
    Wei, Wenshan
    Yu, Feng
    You, Weilong
    Liu, Dayang
    Yang, Heng
    Li, Xinxin
    2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS), 2015, : 1207 - 1210
  • [45] Design and Fabrication of Quartz Micro-Electro-Mechanical System-Based Double-Ended Tuning Fork with Variable Sections
    Liang, Jinxing
    Li, Xuefeng
    Li, Hongsheng
    Ni, Yunfang
    Li, Kunyu
    Huang, Libin
    Ueda, Toshitsugu
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2011, 50 (06)
  • [46] Finite element method design and fabrication of thermo-sensitive quartz tuning fork resonators as temperature sensor
    Xu, Jun
    You, Bo
    2006 1ST IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, VOLS 1-3, 2006, : 1228 - +
  • [47] A resonant sensor composed of quartz double ended tuning fork and silicon substrate for digital acceleration measurement
    Li, Cun
    Zhao, Yulong
    Cheng, Rongjun
    Yu, Zhongliang
    Liu, Yan
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2014, 85 (03):
  • [48] Design and fabrication of quartz micro-electro-mechanical system-based double-ended tuning fork with variable sections
    Key Lab. of Micro-Inertial Instrum. and Adv. Navig. Technol., Ministry of Educ., School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China
    不详
    Jpn. J. Appl. Phys., 6 PART 2
  • [49] Formation of Side Electrode on Quartz MEMS-based Double-ended Tuning Fork Using Enhanced Lift-off Process
    Liang, Jinxing
    Li, Xuefeng
    Ni, Yunfang
    Li, Hongsheng
    Huang, Libin
    Li, Kunyu
    MECHATRONICS AND MATERIALS PROCESSING I, PTS 1-3, 2011, 328-330 : 507 - +
  • [50] Finite element method simulation of a new one-chip-style quartz crystal motion sensor with two functions of gyro and acceleration detection
    Koitabashi, Tatsuo
    Kudo, Seiichi
    Okada, Shigeya
    Tomikawa, Yoshiro
    2001, Japan Society of Applied Physics (40):