Finite element method simulation of double-ended tuning-fork quartz resonator for application to vibratory gyro-sensor

被引:0
|
作者
Sato, Kenji [1 ,2 ]
Ono, Atsushi [1 ]
Tomikawa, Yoshiro [3 ]
机构
[1] Fundamental R and D Division, Engineering Operations Headquarters, TOYOCOM Devices, 2-1-1 Koyato, Samukawa, Koza, Kanagawa 253-0192, Japan
[2] GPHSFSE, Grad. Sch. of Sci. and Eng., Yamagata University, 4-3-16 Jonan, Yonezawa, Yamagata 992-8510, Japan
[3] Department of Electrical Engineering, Faculty of Engineering, Yamagata University, 4-3-16 Jonan, Yonezawa, Yamagata 992-8510, Japan
来源
| 1600年 / Japan Society of Applied Physics卷 / 42期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
10
引用
收藏
相关论文
共 50 条
  • [1] Finite element method simulation of double-ended tuning-fork quartz resonator for application to vibratory gyro-sensor
    Sato, K
    Ono, A
    Tomikawa, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2003, 42 (5B): : 3115 - 3119
  • [2] Simulation of quartz crystal gyro-sensor using double-ended tuning fork resonator for detection of two-axial angular velocities
    Sato, K
    Ono, A
    Tomikawa, Y
    2003 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2, 2003, : 1350 - 1353
  • [3] Experimental study of gyro sensor using double-ended tuning fork quartz resonator
    Sato, K
    Ono, A
    Tomikawa, Y
    PROCEEDINGS OF THE 2004 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM AND EXPOSITION, 2005, : 575 - 578
  • [4] Experimental study of gyro sensor using double-ended tuning fork quartz resonator
    Sato, K
    Ono, A
    Tomikawa, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2004, 43 (5B): : 3000 - 3003
  • [5] Vibratory gyro-sensor using vertically set quartz crystal trident-type tuning fork resonator
    Shiratori, N
    Tomikawa, Y
    Ohnishi, K
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (5B): : 3217 - 3219
  • [6] Feasibility Study of a Pressure Sensor Based on Double-Ended Tuning Fork Quartz Resonator
    Cheng, Rongjun
    Zhao, Yulong
    Li, Cun
    2014 9TH IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS), 2014, : 354 - 357
  • [7] Vibratory gyro-sensor using vertically set quartz crystal trident-type tuning fork resonator
    Shiratori, Norihiko
    Tomikawa, Yoshiro
    Ohnishi, Kazumasa
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1999, 38 (5 B): : 3217 - 3219
  • [8] PIEZOELECTRIC VIBRATORY GYRO-SENSOR USING A TRIDENT-TYPE TUNING FORK RESONATOR
    SATOH, A
    TOMIKAWA, Y
    OHNISHI, K
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (9B): : 5361 - 5364
  • [9] Piezoelectric vibratory gyro-sensor using a trident-type tuning fork resonator
    Satoh, Akira, 1600, JJAP, Minato-ku, Japan (33):
  • [10] Surface electrode configurations for quartz MEMS double-ended tuning fork resonator
    Liang, Jinxing
    Chai, Yanli
    Meng, Guangchan
    Chen, Xueying
    MICRO & NANO LETTERS, 2013, 8 (01) : 52 - 55