Effects of heat treatments in inert ambients on Si/SiO2 structures

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作者：
Revesz, A.G. [1 ]
Hughes, H.L. [2 ]
机构：
[1] Revesz Associates, 7910 Park Overlook Drive, Bethesda, MD 20817, United States
[2] Naval Research Laboratory, Washington, DC 20375, United States
来源：
Journal of Non-Crystalline Solids | 1999年 / 254卷
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Number:; -; Acronym:; NRL; Sponsor: U.S. Naval Research Laboratory;
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页码：47 / 56
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