Study of sensing complex thin films prepared by PECVD method to H2S

被引：0
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作者：
Dai, G. [1 ]
Wu, Y. [1 ]
机构：
[1] Department of Electronic Engineering, Jilin University, Changchun 130023, China
来源：
Journal De Physique. IV : JP | 1999年 / 9 pt 2卷 / 08期
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页码：8 / 805
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