Production of volume wave plasma with internally mounted cylindrical planar microwave launcher and two-dimensional field analysis using finite difference time domain method

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[1] Ogino, Akihisa
[2] Naito, Katsutoshi
[3] Terashita, Fumie
[4] 1,Nanko, Shohei
[5] Nagatsu, Masaaki
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Ogino, A. (taogino@ipc.shizuoka.ac.jp) | 1600年 / Japan Society of Applied Physics卷 / 44期
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页码:8 / 11
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