Effects of O3 on growth and electrical properties of Pb(Zr,Ti)O3 thin films by photoenhanced metalorganic chemical vapor deposition

被引：0
|
作者：
Shimizu, Masaru [1 ]
Fujisawa, Hironori [1 ]
Sugiyama, Masataka [1 ]
Shiosaki, Tadashi [1 ]
机构：
[1] Kyoto Univ, Kyoto, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1994年 / 33卷 / 9 B期
关键词：
13;
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页码：5135 / 5138
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