Cold remote nitrogen plasma effects on pulsed laser deposited CNx films characteristics

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作者：
Jama, C. [1 ]
Goudmand, P. [1 ]
机构：
[1] Lab. Physchim. l'Energetique P., Univ. des Sci. et Technol. de Lille, 59655 Villeneuve d'Ascq, Cedex, France
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Carbon | / 36卷 / 5-6期
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页码：785 / 789
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