Cold remote nitrogen plasma effects on pulsed laser deposited CNx films characteristics

被引：0
|
作者：
Jama, C. [1 ]
Goudmand, P. [1 ]
机构：
[1] Lab. Physchim. l'Energetique P., Univ. des Sci. et Technol. de Lille, 59655 Villeneuve d'Ascq, Cedex, France
来源：
Carbon | / 36卷 / 5-6期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：785 / 789
相关论文
共 50 条
  • [1] Cold remote nitrogen plasma effects on pulsed laser deposited CNx films characteristics
    Jama, C
    Goudmand, P
    FULLERENES AND CARBON BASED MATERIALS, 1998, 68 : 785 - 789
  • [2] Cold remote nitrogen plasma effects on pulsed laser deposited CNx films characteristics
    Jama, C
    Goudmand, P
    CARBON, 1998, 36 (5-6) : 785 - 789
  • [3] Postdeposition annealing of pulsed laser deposited CNx films
    González, P
    Soto, R
    Lusquiños, F
    León, B
    Pérez-Amor, M
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2000, 18 (06): : 3004 - 3007
  • [4] Effects of substrate temperature on the structure and properties of reactive pulsed laser deposited CNx films
    Ong, CW
    Zhao, XA
    Tsang, YC
    Choy, CL
    Chan, PW
    THIN SOLID FILMS, 1996, 280 (1-2) : 1 - 4
  • [5] Effects of deposition pressure on microstructure and tribological properties of pulsed laser deposited CNx films
    Yang, Fang-Er
    Chen, Zhan-Ling
    Zheng, Xiao-Hua
    Zheng, Jin-Xiang
    Shen, Tao
    Guangdianzi Jiguang/Journal of Optoelectronics Laser, 2013, 24 (06): : 1126 - 1132
  • [6] Structural characterisation of CNx thin films deposited by pulsed laser ablation
    Fuge, GM
    Rennick, CJ
    Pearce, SRJ
    May, PW
    Ashfold, MNR
    DIAMOND AND RELATED MATERIALS, 2003, 12 (3-7) : 1049 - 1054
  • [7] Role of Nitrogen in the Formation of CNx Films by Pulsed Laser Deposition
    Wang, Zhiping
    Ito, Hiroaki
    Masugata, Katsumi
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2012, 40 (07) : 1815 - 1819
  • [8] NEXAFS OF PULSED-LASER DEPOSITED BN, CNX, AND GAN FILMS
    TONG, WM
    SHUH, DK
    JIMENEZ, I
    FEILER, D
    WILLIAMS, RS
    CARLISLE, JA
    SUTHERLAND, DGS
    TERMINELLO, LJ
    TREECE, RE
    HORWITZ, JS
    HIMPSEL, FJ
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1995, 210 : 55 - NUCL
  • [9] Microstructure and tribological behavior of pulsed laser deposited a-CNx films
    Zheng, X. H.
    Tu, J. P.
    Song, R. G.
    APPLIED SURFACE SCIENCE, 2010, 256 (10) : 3211 - 3215
  • [10] Effects of the plasma expansion dynamics and of the laser fluence on CNx thin films deposited by laser ablation
    Barreca, F.
    Barletta, E.
    Spadaro, D.
    Spadaro, S.
    Curro, G.
    Trusso, S.
    Neri, F.
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 2010, 165 (6-10): : 809 - 814
12345