Design and fabrication of microactuators for high density data storage

被引：0
|
作者：
Fan, Long-Sheng [1 ]
机构：
[1] IBM Almaden Research Cent, San Jose, United States
来源：
IEEE Transactions on Magnetics | 1996年 / 32卷 / 3 /2期
关键词：
D O I：
10.1109/20.492877
中图分类号：
学科分类号：
摘要：
10
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页码：1855 / 1862
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