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- [3] Experimental study on characteristics of ECR microwave plasma Zhenkong Kexue yu Jishu Xuebao/Vacuum Science and Technology, 1998, 18 (05): : 390 - 394
- [4] Inverse Profiling for Microwave Diagnostics of ECR Ion Source Plasma 2019 13TH EUROPEAN CONFERENCE ON ANTENNAS AND PROPAGATION (EUCAP), 2019,
- [5] Numerical simulation multicomponent ion beam transport from ECR ion source REVIEW OF SCIENTIFIC INSTRUMENTS, 2004, 75 (05): : 1494 - 1496
- [6] AN ECR MICROWAVE PLASMA CATHODE FOR ION SOURCES WITH ELECTROSTATIC REFLEX CONTAINMENT REVIEW OF SCIENTIFIC INSTRUMENTS, 1992, 63 (04): : 2587 - 2589
- [8] Improvement of a microwave ECR plasma source for the plasma immersion ion implantation and deposition process PLASMA SOURCES SCIENCE & TECHNOLOGY, 2004, 13 (03): : 420 - 423
- [9] Numerical simulation program of multicomponent ion beam transport from ECR ion source Nuclear Science and Techniques/Hewuli, 2004, 15 (06): : 352 - 355