MONITORING PARTICLES IN VACUUM-PROCESS EQUIPMENT.

被引：0

作者：

Borden, Peter G.

Baron, Yuda

McGinley, Brian

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Microcontamination | 1987年 / 5卷 / 10期

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页码：30 / 34

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[38] Experience in Automating the Melting Process in Electron-Beam Equipment.
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[39] New Composite Material for the Construction of Plastics Based Process Equipment.
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[40] TELEPERM D - MICROPROCESSOR-BASED PROCESS CONTROL EQUIPMENT.
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