Role of hydrogen in the formation of porous structures in silicon

被引:0
|
作者
Parkhutik, Vitali [1 ]
Andrade Ibarra, Eduardo [2 ]
机构
[1] Technical University of Valencia, Cami de Vera S/n, 46071, Valencia, Spain
[2] Institute of Physics, Natl. Autonomous Univ. of Mexico, DF, Mexico City, Mexico
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
页码:95 / 99
相关论文
共 50 条
  • [31] Dependence of Properties of Variable Gradient Porous Structures of Silicon on the Method of Formation
    Rubtsova, K. I.
    Silina, M. D.
    PHYSICS OF THE SOLID STATE, 2019, 61 (12) : 2302 - 2305
  • [32] Effect of porous silicon formation on stiction in surface micromachined MEMS structures
    Bhattacharya, E
    Rani, HA
    Babu, UV
    Rao, PRS
    Bhat, KN
    Martin, J
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2005, 202 (08): : 1482 - 1486
  • [33] Dependence of Properties of Variable Gradient Porous Structures of Silicon on the Method of Formation
    K. I. Rubtsova
    M. D. Silina
    Physics of the Solid State, 2019, 61 : 2302 - 2305
  • [34] Formation of Gradient-Porous Silicon Structures with Variable Pore Morphology
    E. A. Gosteva
    K. I. Rubtsova
    M. D. Silina
    V. V. Starkov
    Mechanics of Solids, 2020, 55 : 103 - 107
  • [35] Formation of Porous Silicon Filter Structures with Different Properties on Small Areas
    R. Arens-Fischer
    M. Krüger
    M. Thönissen
    V. Ganse
    D. Hunkel
    M. Marso
    H. Lüth
    Journal of Porous Materials, 2000, 7 : 223 - 225
  • [36] Hydrogen in porous silicon - A review
    Manilov, A. I.
    Skryshevsky, V. A.
    MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, 2013, 178 (15): : 942 - 955
  • [37] The role of aluminum in the formation of macropores, microtubes of silicon and nickel made from porous silicon
    Huanca, Danilo Roque
    Salcedo, Walter Jaimes
    JOURNAL OF ALLOYS AND COMPOUNDS, 2019, 777 : 554 - 561
  • [38] The role of wettability of electroless copper coating in porous silicon carbide structures
    Soy, Ugur
    Demir, Adem
    EMERGING MATERIALS RESEARCH, 2020, 9 (02) : 532 - 539
  • [39] Mechanism of hydrogen, oxygen and humidity sensing by Cu/Pd-porous silicon-silicon structures
    Litovchenko, VG
    Gorbanyuk, TI
    Solntsev, VS
    Evtukh, AA
    APPLIED SURFACE SCIENCE, 2004, 234 (1-4) : 262 - 267
  • [40] Fabrication of porous silicon structures
    Searson, P.C.
    Macaulay, J.M.
    Nanotechnology, 1992, 3 (04) : 188 - 191