Transparent conducting Cd2SnO4 film deposited by RF reactive sputtering from Cd-Sn alloy target

Transparent conducting films made of cadmium-tin oxide (Cd2SnO4) are provided by radio frequency (RF) reactive sputtering from a Cd-Sn alloy target in Ar+O2 atmosphere. The electrical and optical properties of the films depend on the oxygen concentration in the gas mixture and the substrate temperature. The lowest resistivity is 2.89×10-6Ω&middotm and the highest optical transmissivity is 95% over the visible light region. The structures of the films under different substrate temperatures are examined by X-ray diffraction.