WARPAGE OF CZOCHRALSKI-GROWN SILICON WAFERS AS AFFECTED BY OXYGEN PRECIPITATION.

被引：0
|
作者：
Shimizu, Hirofumi [1 ]
Watanabe, Tetsuo [1 ]
Kakui, Yoshiharu [1 ]
机构：
[1] Hitachi Ltd, Kofu Branch, Yamanashi,, Jpn, Hitachi Ltd, Kofu Branch, Yamanashi, Jpn
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes | 1985年 / 24卷 / 07期
关键词：
Compendex;
D O I：
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学科分类号：
摘要：
44
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页码：815 / 821
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