Preparation of fluorinated amorphous carbon thin films

被引：0
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作者：
Yokomichi, Haruo [1 ]
Hayashi, Tohru [1 ]
Amano, Tomihiro [1 ]
Masuda, Atsushi [1 ]
机构：
[1] Toyama Prefectural Univ, Toyama, Japan
来源：
Journal of Non-Crystalline Solids | / 227-230卷 / Pt A期
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页码：641 / 644
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